Phase-Shifting Interferometry (PSI) techniques have become fundamental in optical metrology for accurately measuring surface topographies and reconstructing three‐dimensional profiles. By generating ...

Vibrations can produce a number of significant challenges when conducting phase-shifting laser interferometer measurements. Today’s advanced interferometers have the capacity to measure with nanometer ...

Common to optical metrology in many modern systems, the Fizeau design uses a fixed, on-axis coherent point source to illuminate the interferometric cavity. For the most part, it works very well. While ...